The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Feb. 20, 2002
Hiroshi Kurosawa, Chiba, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A scanning exposure apparatus transfers a pattern of a master to a substrate with slit-shaped exposure light while a master stage holding the master and a substrate stage holding the substrate are moved. The apparatus includes a measurement unit arranged to measure positional sync deviations between the master stage and the substrate stage with respect to each of a plurality of points in an exposure shot region on the substrate during scanning exposure of each of the plurality of points to the light, a first calculation unit arranged to calculate a standard deviation of the positional sync deviations measured by the measurement unit with respect to each of the plurality of points in the exposure shot region, and a second calculation unit arranged to calculate a variation of the standard deviations calculated by the first calculation unit with respect to the exposure shot region. In addition, a process unit is arranged to execute a process based on the vibration calculated by the second calculation unit.