The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Nov. 13, 2001
Applicant:
Inventors:
Daniele Gilkes, Pompano Beach, FL (US);
Minseok Oh, Orlando, FL (US);
Sailesh M. Merchant, Orlando, FL (US);
Assignee:
Agere Systems, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/348 ; H01L 2/352 ;
U.S. Cl.
CPC ...
H01L 2/348 ; H01L 2/352 ;
Abstract
A microelectronic device ( ) is formed by plating a layer of material ( ) to fill a cavity ( ) formed in a substrate ( ). The layer of material has a plurality of regions ( ) with respective chemical compositions formed by varying the chemical composition of the plating solution as the layer of material is being deposited. In this manner, expensive additives necessary to achieve desired properties within the cavity may be omitted from the region ( ) of overfill that will be removed by a later planarization process.