The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Nov. 17, 1999
Carl Zeiss Jena GmbH, Jena, DE;
Abstract
A method for determining the distance of a scanning probe of a scanning probe microscope from a specimen surface to be examined comprising the steps of: exciting the scanning probe to oscillations lateral to a surface to be examined; recording at least one amplitude signal and a frequency signal and a phase signal of the oscillating scanning probe; superimposing a vertically oscillating movement of the scanning probe and specimen surface to be examined relative to one another is superimposed on the oscillation of the scanning probe lateral to the specimen surface to be examined; and determining the distance of the scanning probe from the specimen surface from at least one of the amplitude signal and a frequency signal and a phase signal.