The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 09, 2004

Filed:

Oct. 31, 2002
Applicant:
Inventors:

Minoru Fujita, Yamaguchi, JP;

Hiroaki Nakagawa, Yamaguchi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 9/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ;
Abstract

A pellicle comprises a pellicle frame, a pellicle film and at least two liners. The pellicle frame has one end face and the other end face and is provided at its central portion with an opening. The other end face of the pellicle frame is provided with an adhesion layer. The pellicle film is stretched over and attached to the one end face of the pellicle frame. The at least two liners are adhered on the adhesion layer. The at least two liners can be respectively peeled off from the adhesion layer, and when the at least two liners are respectively peeled off from the adhesion layer, a portion of the adhesion layer to which each of the liners was adhered is exposed.


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