The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Jan. 14, 2002
Thomas Palten, Kerpen, DE;
Dirk Kalisch, Düsseldorf, DE;
Leybold Vakuum GmbH, Cologne, DE;
Abstract
A friction vacuum pump for use in a system for regulating the pressure in a vacuum chamber includes a multistage turbomolecular vacuum pump section ( ) whose stages each consist of a row of stator vanes and rotor vanes ( or ). The pump regulates the pressure of heavy gases or of a gas mixture containing heavy gases. To this end, the friction vacuum pump ( ) is equipped with a molecular pump section ( ) located on the fore-vacuum side and a space ( ), in which the pump action is interrupted. The space is provided in the transition area from the turbomolecular vacuum pump section ( ) to the molecular pump section ( ) or in the transition area from the molecular flow to viscous flow.