The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Oct. 05, 2001
Applicant:
Inventor:
Patrick F. Leonard, Ann Arbor, MI (US);
Assignee:
Electro Scientific Industries, Inc., Portland, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/100 ;
U.S. Cl.
CPC ...
G01N 2/100 ;
Abstract
The present invention captures images of a circuit chip with a time delay integration or TDI sensor. The circuit chip is on a movable stage which moves at the same rate at which the TDI sensor clocks. A pulsed laser is directed toward the circuit chip and activated in synchronisation with the clock rate of the TDI sensor such that laser is activated when the TDI sensor is imaging the object and the laser is deactivated when the TDI sensor is transferring its charge.