The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Apr. 03, 2002
Konstantinos P. Giapis, Pasadena, CA (US);
Mohan Sankaran, Pasadena, CA (US);
Michael J. Gordon, Arcadia, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
Hollow cathode microdischarges in a tube geometry provides the formation of stable, high-pressure discharges in a variety of flowing gases including argon, helium, nitrogen, and hydrogen. Direct current discharges are ignited in stainless steel capillary tubes (d =178 &mgr;m) which are operated as the cathode and using a metal grid or plate as the anode. Argon discharges can be sustained at atmospheric pressure with voltages as low as 260 V for cathode-anode gaps of 0.5 mm. In one embodiment using a molybdenum substrate as the anode, microjets are struck in H /CH mixtures at 200 Torr to deposit diamond films with well-faceted crystals. Optical emission spectroscopy of discharges used for growth confirms the presence of atomic hydrogen and CH radicals. Ballasting of individual tubes allows parallel operation of the microjets for larger area materials processing.