The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Dec. 11, 2002
Shinichi Shima, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An aligning method for a scanning projection exposure apparatus, which scans a first movable stage which moves with a first object being placed thereon, and a second movable stage which moves with a second object being placed thereon, in synchronism with each other with respect to a projection optical system, and projects a pattern formed on the first object onto the second object through the projection optical system. The aligning method includes the steps of (i) positioning the first object with respect to the first movable stage, (ii) detecting a position of a mark formed on a reference plate fixed to the first movable stage by a detection system, and (iii) obtaining a detection reference position of the detection system from a position detection result. The method also includes detecting a position of a mark formed on the first object with the detection system, thereby obtaining a deformation amount of the first object.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile