The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Jun. 06, 2002
Megan Ravetz, Newton, GB;
Graham Williams, Hoowall, GB;
Andrew Nelson, Cowridge, GB;
Roy Trevor Blunt, Cwmbran, GB;
Howard Williams, St. Mellons, GB;
Rajesh Odedra, Altrincham, GB;
Other;
Abstract
A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler ( ) to a plurality of reactor sites ( ) wherein a carrier gas ( ) is introduced into the container ( ) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites ( ). The gaseous mixture may be stored in a reservoir ( ) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.