The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Nov. 01, 2002
Randall L. Kubena, Oak Park, CA (US);
Richard Joyce, Thousand Oaks, CA (US);
Robert Thomas M'Closkey, Los Angeles, CA (US);
A. Dorian Challoner, Manhattan Beach, CA (US);
Other;
Abstract
The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.