The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2004
Filed:
Feb. 06, 2002
Applicant:
Inventors:
David W. Stockbower, Burlington, MA (US);
Peter V. Kimball, Dennis, MA (US);
Iraj Gashgaee, Waltham, MA (US);
Geoffrey W. Kaiser, Groton, MA (US);
Assignee:
Mykrolis Corporation, Bedford, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23H 1/100 ;
U.S. Cl.
CPC ...
B23H 1/100 ;
Abstract
A plating cell base design that utilizes a single connection that provides both fluid communication and electrical communication to the cell. The design eliminates many of the components previously necessary to effectuate fluid and electrical seals. With fewer connections, material cost is reduced, reliability is enhanced, and downtime is reduced.