The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2004
Filed:
Sep. 28, 2001
Michael Antonell, Orlando, FL (US);
Erik Cho Houge, Orlando, FL (US);
Larry E. Plew, St. Cloud, FL (US);
Catherine Vartuli, Orlando, FL (US);
Jennifer Juszczak, Orlando, FL (US);
Agere Systems Inc., Allentown, PA (US);
Abstract
A method and apparatus for minimizing the surface contamination of semiconductor wafers ( ) during the semiconductor device manufacturing process. Semiconductor wafers ( ) are stored in a storage cassette ( ) with their face sides ( ) facing downward and their back sides ( ) facing upward. Particulate contamination present on the back sides of the wafers is thereby secured to the wafers by the force of gravity, and the faces of the wafers are shielded from falling debris. An automated wafer handling device ( ) is provided with a rotary joint ( ) to accomplish the wafer flipping motion before inserting a wafer into a cassette and after removing the wafer from the cassette.