The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
Mar. 26, 2001
Shinichi Shima, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A scanning projection exposure apparatus which has a first movable stage which moves with a first object being placed thereon, and a second movable stage which moves with a second object being placed thereof. The projection exposure apparatus scans the first and second movable stages in synchronism with each other with respect to a projection optical system, and projects a pattern formed on the first object onto the second object through the projection optical system. The apparatus includes a reference plate fixed to the first movable stage and having a mark, which is a reference for measuring deformation of the first object occurring due to exposure of the first object to exposure light, a mark, which is formed on the first object, for measuring deformation, and a detection system for detecting a position of the mark formed on the reference plate and a position of the mark formed on the first object. A deformation amount of the first object is obtained based on the position of the mark formed on the first object with respect to a reference position serving as the position of the mark formed on the reference plate, which are detected by the detection system.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile