The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
May. 10, 2002
Pascal Colpo, Annecy, FR;
François Rossi, Bi Andronno, IT;
European Community, , BE;
Abstract
The plasma processing apparatus comprises a plasma chamber ( ) bounded, on at least one side thereof, by an electrically conductive wall ( ), said electrically conductive wall comprising one or several apertures ( ) for interrupting a current path through said wall, external electromagnetic means ( ) for supplying electromagnetic energy into the plasma chamber through the electrically conductive wall, thereby generating a plasma inside said chamber, and sealing means for sealing the apertures. The apparatus is characterised in that the sealing means comprises one or more electrically conductive enclosure elements which are electrically insulated from the electrically conductive wall.