The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
Apr. 29, 2002
Applicant:
Inventor:
Martin Dubs, Trubbach, CH;
Assignee:
Unaxis Balzers Limited, Furstentum, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/435 ;
U.S. Cl.
CPC ...
C23C 1/435 ;
Abstract
A device and method has a magnetron sputter source with a multipart target ( ) and movable magnet system ( ). By variation of the power delivery of the power supply ( ), specific areas of the multipart target ( ) can be preferably affected, which permits setting the stoichiometry of the sputtered-off target materials on the substrate ( ) to be covered and positively affecting the homogeneity of the layer structure.