The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
Mar. 17, 2000
Tadahiro Ohmi, Sendai-shi, Miyagi-ken, JP;
Nobuyoshi Tanaka, Tokyo, JP;
Masaki Hirayama, Sendai, JP;
Other;
Abstract
In an excimer laser oscillation apparatus including a laser chamber ( ) constituted by a laser tube ( ) for storing a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, He and F gas, and an optical resonator consisting of a pair of reflection mirrors ( ) arranged to sandwich the laser chamber ( ) therebetween, the inner surface of the laser chamber ( ) for storing the laser gas has a reflection-free surface with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, and a means (waveguide ) for introducing a microwave for exciting the laser gas in the laser chamber ( ) is prepared. With this arrangement, an excimer laser oscillation apparatus, an oscillation method, and an exposure apparatus can be provided, which can reduce the load on the lens material and its surface, can simplify the mirror or laser scanning control system, and are satisfactorily used in mass production since the service life of an excimer laser can be sufficiently prolonged.