The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
Sep. 03, 2002
Applicant:
Inventors:
Felix Mayer, Zürich, CH;
Moritz Lechner, Zürich, CH;
Assignee:
Sensirion A/G, Zurich, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G 4/005 ;
U.S. Cl.
CPC ...
H01G 4/005 ;
Abstract
A sensor, in particular a humidity sensor, comprises a measuring layer ( ), the dielectric properties of which depend on a parameter to be measured, e.g. of the humidity of the environmental air. Electrodes ( ) are arranged on a substrate ( ) side by side for capacitively measuring the measuring layer ( ). A protective layer ( ) of a non-oxidizing material, in particular a layer of silicon oxide or gold, is arranged between the electrodes ( ) and the measuring layer ( ). This layer prevents an oxidation of the electrodes ( ) and increases the live time and reliability of the sensor.