The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
Apr. 10, 2002
Applicant:
Inventors:
Assignee:
Telefonaktiebolaget LM Ericsson (publ), Stockholm, SE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/900 ;
U.S. Cl.
CPC ...
H01L 2/900 ;
Abstract
In an integrated circuit, particularly an integrated circuit for radio frequency applications, a semiconductor structure for isolation of semiconductor devices that includes a semiconductor substrate, at least one shallow trench extending vertically into the substrate, a deep trench laterally located within the shallow trench, where the deep trench extends vertically further into the substrate. The deep trench is self aligned to the shallow trench with a controlled lateral distance between an edge of the shallow trench and an edge of the deep trench and the lateral extensions of the shallow and deep trenches, respectively, are independently chosen.