The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
Feb. 21, 2002
Won-tai Ki, Suwon, KR;
Abstract
An exposure method for correcting dimension variations in a pattern resulting from the fogging effect occurring during electron beam exposure and/or the loading effect occurring during dry etching, and a recording medium for recording the same are provided. According to the exposure method, dimension variations can be minimized by calculating the loading effect and/or fogging effect causing dimension variations in a pattern, correcting mask pattern dimension data in advance based on a calculated result and making exposure according to the corrected pattern data. Further, the loading effect and/or fogging effect can be easily calculated because the above-described method can be realized as a computer program and the computer program can be included in an exposure tool, thereby enabling exposure based on a corrected value.