The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
Dec. 01, 2000
Satoru Fujii, Osaka, JP;
Isaku Kanno, Nara, JP;
Ryoichi Takayama, Osaka, JP;
Osamu Watanabe, Kumamoto, JP;
Kenji Tomita, Kumamoto, JP;
Shigeyuki Takao, Fukuoka, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A piezoelectric thin film element D, in which a piezoelectric thin film with first and second electrode films and respectively formed on its opposite surfaces in the thickness direction is held by a hold film , is fabricated by forming each film , and on a film formation substrate 11 and removing the film formation substrate by etching. Even when the hold film is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film is protected from damage by etchant because the first electrode film which comes into contact with the film formation substrate is formed such that the overall circumference of a peripheral edge portion of the first electrode film laterally extends beyond the lateral surface of the piezoelectric thin film and closely adheres to the hold film