Controller, temperature controller and heat processor using same

Abstract

A controller controls a physical variable such as temperature of a controlled system. A variable calculator calculates and output a manipulated variable on the controlled system based on of a target value such as a target temperature and a feedback value such as the measured temperature of the controlled system. A dead-time compensator provides a dead-time compensated output using a model simulating the controlled system having a dead time and an idealized model having no dead time, based on the manipulated variable outputted from the variable calculator to carry out an ordinary control and a dead-time compensated control. A switch functions to select the dead-time compensated control by providing a dead-time compensated output to the variable calculator or an ordinary control providing no dead-time compensated output to the variable calculator. The dead-time compensated control is carried out at least during set point response of the controller.