The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Apr. 20, 2001
Applicant:
Inventors:
Assignee:
NHK Spring Co., Ltd., Yokohama, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23B 3/128 ;
U.S. Cl.
CPC ...
B23B 3/128 ;
Abstract
An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO , ZrO , V O , Nb O , Ta O , Co O , Cr O , and NiO so that its electrical resistivity in a working temperature region ranges from 1×10 to 1×10 &OHgr;·cm. This electrostatic chuck is highly resistant to a corrosive environment such as fluoride plasma.