The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 03, 2004

Filed:

Sep. 30, 1999
Applicant:
Inventors:

Rosalinda M. Ring, Austin, TX (US);

Rama R. Goruganthu, Austin, TX (US);

Brennan V. Davis, Austin, TX (US);

Jeffrey D. Birdsley, Austin, TX (US);

Michael R. Bruce, Austin, TX (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/128 ; G01R 3/1303 ; G01R 3/1311 ;
U.S. Cl.
CPC ...
G01R 3/128 ; G01R 3/1303 ; G01R 3/1311 ;
Abstract

According to an example embodiment of the present invention, a defect detection approach involves detecting the existence of defects in an integrated circuit as a function of at least one applied energy source. In response to energy that is applied to the integrated circuit, response signals are detected. A parameter including information such as amplitude, frequency, phase, or a spectrum is developed for a reference integrated circuit device and then compared to the detected response signal. The deviation in the response and reference signals, and the type of energy source used, are correlated to a particular defect in the device.


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