The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Sep. 30, 2002
Chialun Tsai, Thousand Oaks, CA (US);
Innovative Technology Licensing, LLC, Thousand Oaks, CA (US);
Abstract
A MEMS device with a electrostatic comb actuator is comprised of a supporting substrate, with device features on only one side, and two silicon device layers locally bonded together by thermal compression bonding of metal pads. Use of a supporting substrate enables the silicon device layers to be relatively thin and eliminates the through-wafer etch procedure, which greatly reduces silicon etch times and improves the accuracy and yield of the etch processes. Use of metal-metal interlayer bonds avoids the need for a wet chemical etch for release of the moveable structure so that the device can be fabricated with high yield. Scanning micromirror devices according to the present invention were fabricated with almost 100% yield and exhibited scanning over a 12° optical range and a mechanical angle of 3° at a high resonant frequency of 2.5 kHz with an operating voltage of only 20 VDC.