The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6685847 B1

PDF
Full Text
Expired
Date of Patent:
Feb. 03, 2004

Filed:

Jan. 04, 2001
Applicant:
Inventor:

Shoji Sadayama, Chiba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/300 ;
U.S. Cl.
CPC ...
G01N 1/300 ;
Abstract

A cross-section is obtained in which a sample shape is clearly delineated by forming a covering layer of a material different from that of the sample surface on the sample surface, forming a protective layer on the covering layer forming a hole in the protective and covering layers and the sample surface to expose the cross-section, and tilting the sample and scanning the cross-section with a focused ion beam so as to obtain a microscopic image of the cross-section. By forming the covering layer of a material different from that of the sample surface, the shape of the sample can be clearly viewed in the obtained image.


Find Patent Forward Citations

Sadayama, Shoji. (2004). Method for observing cross-sectional structure of sample (U.S. Patent No. 6685847). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6685847

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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