The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Nov. 27, 2001
Takeaki Itsuji, Kanagawa, JP;
Shunichi Shido, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A non-contact-type atomic microscope including a plurality of probes differing in resonance frequency, an actuator for vibrating the plurality of probes simultaneously, and a drive signal generating circuit for generating a drive signal for the actuator. The drive signal contains a predetermined frequency for vibrating each of the plurality probes. Also, there is a method for observing a surface shape of a sample by using a plurality of probes. The method includes a step of vibrating the plurality of probes simultaneously with a common actuator in a vicinity of their resonance frequencies. A signal for driving the actuator contains a predetermined frequency for vibrating each of the probes.