The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2004
Filed:
Dec. 06, 2001
Applicant:
Inventors:
Kenneth E. Tinsley, Plano, TX (US);
Faisal Tariq, Plano, TX (US);
Assignee:
Mykrolis Corporation, Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/06 ;
U.S. Cl.
CPC ...
G05D 7/06 ;
Abstract
The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve.