The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2004
Filed:
Jun. 03, 2002
Hans Lettner, Landskron, AT;
Xaver Kollmer, Marzling, DE;
Günther Schindler, Hochbruck, DE;
Ernst Georg Frisch, München, DE;
Abstract
The invention relates to a monitoring system for a conveying device for flat articles, especially wafers, which conveying device is provided with a carriage ( ) that is movable along a predetermined path next to a flat article ( ) that is located at a predetermined removal location, the carriage having a receiving device for the accommodation of the flat article ( ), which monitoring system contains a light source ( ) having a light-exit window and a light receiver ( ) having a light-admission window, whereby the light-exit window and the light-admission window are positioned in such a way that a light beam ( ) directed form the light-exit window to the light-admission window is partially covered by the carriage ( ) during its movement through the light beam, and an evaluation unit that is connected to the light receiver and that compares a target signal derived from its movement of the carriage along a target path with an actual signal derived from an actual movement of the carriage, and indicates a deviation.