The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2004
Filed:
Feb. 26, 2002
Applicant:
Inventors:
Shogo Kosuge, Tachikawa, JP;
Takahiro Shimizu, Higashimurayama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 1/104 ;
U.S. Cl.
CPC ...
G01B 1/104 ;
Abstract
A critical dimension measurement method and apparatus capable of measurement even for a object below a resolution of an optical microscope. An image of an object is picked up by using an optical microscope and an image sensor. From an obtained video signal, signal positions of two points coinciding with a predetermined luminance level are extracted. A difference in position between the two points is multiplied by a ratio of maximum luminance between the two points to maximum luminance serving as a reference. On the basis of a resultant product, a size of the object is measured.