The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2004
Filed:
Oct. 22, 2002
Bradley Scott Young, Irving, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The present invention relates to a test structure and a method for forming a test structure over a semiconductor substrate. The test structure comprises a plurality of patterned electrically conductive metal layers within a scribe line. The plurality of metal layers further comprises one or more lower metal layers comprising a plurality of split pads longitudinally spaced along the length of the scribe line, wherein a channel traversing the length of the scribe line is define. One or more top metal layers comprising a plurality of solid pads generally residing over the split pads defines a plurality of columns of pads. One or more conduits generally residing within the channel are associated with one or more lower metal layers and connect two or more split pads associated with the respective one or more lower metal layers, wherein a bow-tie lead is defined. One or more insulating layers are further disposed between the plurality of metal layers, and a plurality of pad vias electrically connect the respective split pads and solid pads associated with the respective two or more columns of pads.