The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2004
Filed:
Sep. 06, 2002
Applicant:
Inventors:
Walter Haag, Grabs, CH;
Pius Grunenfelder, Wangs, CH;
Urs Schwendener, Buchs, CH;
Markus Schlegel, Azmoos, CH;
Siegfried Krassnitzer, Feldkirch, AT;
Assignee:
Unakis Trading AG, Balzers, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; C23C 1/435 ;
U.S. Cl.
CPC ...
C23C 1/434 ; C23C 1/435 ;
Abstract
A method for producing flat panels for TFT or plasma display applications includes forming a sputter source within a sputter coating chamber, the source having at least two electrically mutually isolated stationery bar-shaped target arrangements. A controlled magnet arrangement provided under each target with a time-varying magnetron field.