The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2004
Filed:
Sep. 15, 1998
Applicant:
Inventor:
Robert Dawson, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/972 ;
U.S. Cl.
CPC ...
H01L 2/972 ;
Abstract
The electromigration characteristics of patterned metal features, such as metal lines, in semiconductor devices is improved by applying a conductive layer to substantially surround and encapsulate the patterned metal features. A portion of the conductive layer may be removed to form conductive sidewall spacers on the side surfaces of the patterned metal features. In an embodiment of the invention, the conductive layer comprises a first layer of titanium and a second layer of titanium-nitride thereon.