The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2004
Filed:
Mar. 27, 2003
Applicant:
Inventor:
Mitsuru Ikeuchi, Hyogo, JP;
Assignee:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21G 4/00 ;
U.S. Cl.
CPC ...
G21G 4/00 ;
Abstract
An EUV radiation source comprises a first electrode having a first through hole, a second electrode having a second through hole, a movable insulator, having a plurality of third through holes, provided between the first and second electrodes, wherein actuating gas is introduced in the first, second through holes and one of the plurality of third through holes, and voltage is impressed between the first and second electrodes when the first, second and plural through holes are located on a common axis.