The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2004
Filed:
Mar. 10, 2000
Applicant:
Inventor:
Stephen Gary Young, Shoreham By Sea, GB;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/7317 ;
U.S. Cl.
CPC ...
H01J 3/7317 ;
Abstract
A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer on which a wafer is supported. Each wafer support element has a plurality of spring loaded plungers of a material having a lower coefficient of friction than that of the elastomer layer so as to support a wafer such that it can be slid across the wafer support element without sticking to the elastomer layer . A position detector can be provided on a gripper which mounts each wafer on a wafer support element to detect that the wafer has been correctly positioned.