The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2004
Filed:
Aug. 17, 2001
Takashi Nakabayashi, Hirakata, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
An etch stopper member is formed under a cell plate electrode so as to surround an active region along a periphery of the cell plate electrode. The etch stopper member is formed from a material that is resistant to an etchant of a first interlayer insulating film. For example, a dummy gate line and a cylindrical wall formed thereon are provided as the etch stopper member. Either the dummy gate line or the cylindrical wall may be provided as the etch stopper member. The etch stopper member prevents the interlayer insulating film from being laterally etched at the boundary between a DRAM memory section and a logic section. This eliminates the need to provide an etching margin, allowing for reduction in the area of the DRAM memory section.