The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2004
Filed:
May. 13, 2002
Igor Petrov, Holon, IL;
Zvika Rosenberg, Jerusalem, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A beam directing method and device are presented for spatially separating between a primary charged particle beam and a beam of secondary particles returned from a sample as a result of its interaction with the primary charged particle beam. The primary charged particle beam is directed towards the beam directing device along a first axis passing an opening in a detector, which has charged particle detecting regions outside this opening. The trajectory of the primary charged particle beam is then affected to cause the primary charged particle beam propagation to the sample along a second axis substantially parallel to and spaced-apart from the first axis. This causes the secondary charged particle beam propagation to the detecting region outside the opening in the detector.