The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2004
Filed:
Oct. 01, 2002
Wataru Yamamoto, Tokyo, JP;
Yamamoto-MS Co., Ltd., Tokyo, JP;
Abstract
A cathode cartridge (N) for an electroplating tester includes a cathode conductor ( ) that conducts electricity to a surface (Wa) to be plated of a silicon wafer (W) as an object to be plated, a first insulator ( ) that covers a front side of the silicon wafer (W) and holds the cathode conductor ( ), and a second insulator ( ) that covers a back side of the silicon wafer (W) and holds the silicon wafer (W). Negative portions other than the surface (Wa) to be plated of the silicon wafer (W) are insulated from plating solution with a first O-ring ( ) fitted in the first insulator ( ) and a second O-ring ( ) fitted in the second insulator ( ).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile