The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2004
Filed:
Jul. 03, 2001
Applicant:
Inventors:
Tuan T. Ha, Dedham, MA (US);
Hakan Elmali, Groton, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/04 ; B08B 5/04 ; B08B 9/035 ;
U.S. Cl.
CPC ...
B08B 7/04 ; B08B 5/04 ; B08B 9/035 ;
Abstract
A substrate handling end effector is provided. The substrate handling end effector has a vacuum chuck to support a semiconductor substrate thereon. A vacuum passage and a liquid passage are located in the vacuum chuck. The vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source. The liquid passage is connected to the vacuum passage.