The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2004

Filed:

Jun. 03, 2002
Applicant:
Inventor:

Roberto Cerruti, Turin, IT;

Assignee:

Varian S.p.A., Turin, IT;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F03D 5/00 ;
U.S. Cl.
CPC ...
F03D 5/00 ;
Abstract

A turbomolecular vacuum pump ( ) comprises a first pumping section ( ) having pumping stages with bladed rotor discs, a second pumping section ( ) having pumping stages with smooth rotor discs, a third pumping section ( ) having a pumping stage with a toothed rotor disc ( ), and a fourth pumping section ( ) of the ejector or venturi pump type. (FIG. )


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