The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2004
Filed:
Oct. 30, 2001
Seiko Instruments Inc., , JP;
Abstract
To provide a small vacuum pump making it possible to efficiently perform evacuation from the atmosphere to a high vacuum (degree of vacuum: 10 Pa) by using a single pump unit. A turbo-molecular pump mechanism portion is arranged on the high-vacuum side, a volute pump mechanism portion is arranged on the atmosphere side, and a thread groove pump mechanism portion is arranged between the turbo-molecular pump mechanism portion and the volute pump mechanism portion. Further, rotor blades of the turbo-molecular pump mechanism portion, a rotor of the thread groove pump mechanism portion, and an impeller of the volute pump mechanism portion are integrally mounted to a single rotor shaft, which is rotated by a single motor.