The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
May. 01, 2002
Applicant:
Inventors:
Pascal Rudent, Montpellier, FR;
André Boyer, Montpellier, FR;
Alain Giani, Le Cres, FR;
Pierre Navratil, Montpellier, FR;
Assignee:
Societe Qualiflow SA, Montpellier Cedex, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 5/00 ;
U.S. Cl.
CPC ...
G01F 5/00 ;
Abstract
Construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, includes of the following steps: depositing an insulating layer of several microns by electron gun on the sensor tube, then depositing the components of the thermocouple, by the electron gun, through the nickel masks, at a residual pressure lower than 10 torr, at a thickness of several thousand Angstroms, annealing of the capillary tube for one hour, then the mounting of a heating element on the capillary tube treated in this manner.