The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Jan. 25, 2002
Applicant:
Inventors:
Manfred Lohmeyer, Nackenheim, DE;
Stefan Bauer, Alzey, DE;
Burkhard Danielzik, Bingen, DE;
Wolfgang Möhl, Worms, DE;
Nina Freitag, Wallertheim, DE;
Assignee:
Schott Glas, Mainz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 3/104 ; H01L 3/1075 ; H01L 2/1205 ; C23C 1/656 ; C23C 1/624 ;
U.S. Cl.
CPC ...
H01L 3/104 ; H01L 3/1075 ; H01L 2/1205 ; C23C 1/656 ; C23C 1/624 ;
Abstract
There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.