The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Jun. 14, 2002
Applicant:
Inventors:
Assignee:
University of Southampton, Hampshire, GB;
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; G03C 5/00 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; G03C 5/00 ;
Abstract
A method of micro-structuring a surface of a sample of ferroelectric material, the method comprising: (a) taking a sample of ferroelectric material having a −z face which is to be etched; (b) illuminating the −z face with ultraviolet light to define illuminated and unilluminated parts of the surface; and (c) immersing the −z face in an etchant to selectively remove the unilluminated parts of the −z face at a greater rate than the illuminated parts. The method can be carried out using pulsed ultraviolet light to etch lithium niobate crystals cut for etching on the −z face, and may further be combined with ablation to produce multi-level surface structures.