The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Jan. 22, 2002
Applicant:
Inventors:
Franz Josef Schaefer, Rankweil, AT;
Helfried Weinzerl, Feldkirch, AT;
Assignee:
Unaxis Balzers Aktiengesellschaft, Balzers, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/456 ; C23C 1/654 ;
U.S. Cl.
CPC ...
C23C 1/456 ; C23C 1/654 ;
Abstract
A lock chamber ( ) is isolated from the environment (U) by a lock-valve ( ) and from a vacuum chamber configuration ( ) by a lock valve ( ). A turbo vacuum pump ( ) acts upon the vacuum chamber configuration ( ). An additional pump ( ) is switchably ( ) connected downstream from the pump, which switchably operates either as a prevacuum pump for the turbo vacuum pump ( ) or as lock chamber pump.