The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Jun. 12, 2001
Applicant:
Inventors:
Murray Fulton Gillies, Eindhoven, NL;
Antonius Emilius Theodorus Kuiper, Eindhoven, NL;
Assignee:
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 8/80 ;
U.S. Cl.
CPC ...
C23C 8/80 ;
Abstract
The invention relates to a method of manufacturing a spin valve structure ( ) of the GMR-type. Such a structure includes a stack of a magnetic layer ( ), a nonmagnetic layer ( ) and a sense layer ( ) of a ferromagnetic material. In order to obtain a spin valve structure having a very good GMR effect the method comprises the following specific steps: oxidation of the ferromagnetic material of the sense layer; deposition of aluminium on the oxidized ferromagnetic material; oxidation of the deposited aluminium using oxygen from the oxidized ferromagnetic material.