The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Nov. 16, 2001
Applicant:
Inventors:
Hirotoshi Namba, Ibara, JP;
Takahiro Kobiki, Ibara, JP;
Assignee:
Tazmo Co., Ltd., Okayama, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B66C 2/300 ;
U.S. Cl.
CPC ...
B66C 2/300 ;
Abstract
A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, includes a robotic arm formed of a first forearm supported by the tip part of a base arm so as to be freely rotatable. A first end effector on which a work piece is placed is supported by the tip part of the first forearm so as to be freely rotatable. A second forearm is supported by the tip part of the base arm so as to be freely rotatable is attached above the first forearm so as to overlap the first forearm. A second end effector on which a work piece is placed is supported by the tip part of the second forearm so as to be freely rotatable.