The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2003
Filed:
Mar. 05, 2002
Michinobu Tanioka, Tokyo, JP;
Takahiro Kimura, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A probe is provided so as to obtain an electrical contact between a semiconductor device having a plurality of first electrodes as external terminals and an inspection substrate having a plurality of second electrodes so as to inspect the semiconductor device. A first substrate has through holes formed at positions corresponding to the first electrodes. Probe pins are fixed in the through holes. A second substrate has a rewiring layer for extending a pitch of the first electrodes and penetration electrodes for drawing out the first electrodes to a back surface. A contact is disposed between the penetration electrodes and the second electrodes and has conductivity and elasticity only in a vertical direction.