The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2003
Filed:
Jun. 01, 2001
Michael Ray, Goleta, CA (US);
Raytheon Company, Lexington, MA (US);
Abstract
A microbolometer unit cell ( ) includes a substantially planar upper-level incident radiation absorption and detection structure ( ), a substantially planar middle-level radiation reflection structure ( ) spaced apart from the upper-level incident radiation absorption and detection structure for defining an optical resonant cavity ( ) there between, and a substantially planar lower-level thermal isolation leg structure ( ) spaced apart from the middle-level radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg ( ) that passes through an aperture ( ) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolation leg structure is electrically coupled to the readout circuit through another leg ( ) that terminates on an electrical contact ( ) disposed on an underlying readout integrated circuit ( ), and the middle-level radiation reflection structure is supported by an extension of the leg ( A).