The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2003
Filed:
Jun. 16, 2003
Petrus Maria Meijer, Eindhoven, NL;
Cornelis Adrianus Henricus Antonius Mutsaers, Eindhoven, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
The invention relates to a semiconductor device comprising a substrate ( ) comprising for instance silicon with thereon a layer ( ) comprising at least organic material which contains a passage ( ) to the substrate ( ). The passage ( ) has walls ( ) transverse to the layer ( ). A metal layer ( ) is applied on the substrate ( ) in at least that portion which adjoins the passage ( ). The organic material forming the walls ( ) of the passage ( ) is covered with an oxide liner ( ), and the passage ( ) is filled with a metal ( ). According to the invention, a metal liner ( ) comprising Ti or Ta is provided between the oxide liner ( ) and the metal ( ) filling the passage ( ). It is achieved by this that the device has a better barrier between the organic material ( ) and the interconnection metal ( ) and that the organic material ( ) has a better protection during the various steps of the process.