The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2003
Filed:
Jan. 25, 2002
Applicant:
Inventors:
Koichi Genei, Chiba-ken, JP;
Makoto Okada, Chiba-ken, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1316 ; H01L 2/1318 ; H01S 5/02 ;
U.S. Cl.
CPC ...
H01L 2/1316 ; H01L 2/1318 ; H01S 5/02 ;
Abstract
A semiconductor laser of present invention is constructed by an aluminium oxide (Al O ) film on an end surface opposed to a beam emission surface of the semiconductor laser, a silicon nitride (SiN , or Si N ) film on the aluminium oxide film, and a silicon oxide (SiO ) film on the silicon nitride film. These films are made successively by a method of Electron Cyclotron Resonance (ECR) sputtering.